5/17/2011	8:57:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/17/2011	8:57:08 PM	Recipe started at 8:57 PM
5/17/2011	8:57:09 PM	H2 valve closed
5/17/2011	8:57:09 PM	BCl3 valve closed
5/17/2011	8:57:09 PM	PH3 valve closed
5/17/2011	8:57:09 PM	SiCl4 pre valve closed
5/17/2011	8:57:09 PM	SiCl4 post valve closed
5/17/2011	8:57:09 PM	Main Vac valve closed
5/17/2011	8:57:09 PM	Bypass valve closed
5/17/2011	8:57:09 PM	Bubbler valve closed
5/17/2011	8:57:09 PM	Helium valve opened
5/17/2011	8:57:09 PM	Helium MFC set to  500.000000
5/17/2011	8:57:09 PM	H2 MFC set to  0.000000
5/17/2011	8:57:09 PM	BCl3 MFC set to  0.000000
5/17/2011	8:57:09 PM	PHl3 MFC set to  0.000000
5/17/2011	8:57:09 PM	SiCl4 MFC set to  0.000000
5/17/2011	8:57:09 PM	Bypass solenoid MFC set to  0.000000
5/17/2011	8:57:09 PM	Tube furnace set to 0
5/17/2011	8:58:28 PM	Helium valve closed
5/17/2011	8:58:28 PM	H2 valve closed
5/17/2011	8:58:28 PM	BCl3 valve closed
5/17/2011	8:58:28 PM	PH3 valve closed
5/17/2011	8:58:28 PM	SiCl4 pre valve closed
5/17/2011	8:58:28 PM	SiCl4 post valve closed
5/17/2011	8:58:28 PM	Main Vac valve closed
5/17/2011	8:58:28 PM	Bypass valve closed
5/17/2011	8:58:28 PM	Bubbler valve closed
5/17/2011	8:58:28 PM	Helium MFC set to  0.000000
5/17/2011	8:58:28 PM	H2 MFC set to  0.000000
5/17/2011	8:58:28 PM	BCl3 MFC set to  0.000000
5/17/2011	8:58:28 PM	PHl3 MFC set to  0.000000
5/17/2011	8:58:28 PM	SiCl4 MFC set to  0.000000
5/17/2011	8:58:28 PM	Bypass solenoid MFC set to  0.000000
5/17/2011	8:58:29 PM	Tube furnace set to 0
5/17/2011	8:58:29 PM	Run finished at 8:58 PM
5/17/2011	8:58:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/17/2011	9:08:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2011	9:08:07 PM	Recipe started at 9:08 PM
5/17/2011	9:08:07 PM	Helium valve closed
5/17/2011	9:08:07 PM	H2 valve closed
5/17/2011	9:08:07 PM	BCl3 valve closed
5/17/2011	9:08:07 PM	PH3 valve closed
5/17/2011	9:08:07 PM	SiCl4 pre valve closed
5/17/2011	9:08:07 PM	SiCl4 post valve closed
5/17/2011	9:08:07 PM	Main Vac valve closed
5/17/2011	9:08:07 PM	Bubbler valve closed
5/17/2011	9:08:07 PM	Bypass valve opened
5/17/2011	9:08:07 PM	Helium MFC set to  0.000000
5/17/2011	9:08:07 PM	H2 MFC set to  0.000000
5/17/2011	9:08:07 PM	BCl3 MFC set to  0.000000
5/17/2011	9:08:07 PM	PHl3 MFC set to  0.000000
5/17/2011	9:08:07 PM	SiCl4 MFC set to  0.000000
5/17/2011	9:08:07 PM	Bypass solenoid MFC set to  0.000000
5/17/2011	9:08:08 PM	Tube furnace set to 0
5/17/2011	9:08:40 PM	Helium valve closed
5/17/2011	9:08:40 PM	H2 valve closed
5/17/2011	9:08:40 PM	BCl3 valve closed
5/17/2011	9:08:40 PM	PH3 valve closed
5/17/2011	9:08:40 PM	SiCl4 pre valve closed
5/17/2011	9:08:40 PM	SiCl4 post valve closed
5/17/2011	9:08:40 PM	Bubbler valve closed
5/17/2011	9:08:40 PM	Main Vac valve opened
5/17/2011	9:08:40 PM	Bypass valve opened
5/17/2011	9:08:40 PM	Helium MFC set to  0.000000
5/17/2011	9:08:40 PM	H2 MFC set to  0.000000
5/17/2011	9:08:40 PM	BCl3 MFC set to  0.000000
5/17/2011	9:08:40 PM	PHl3 MFC set to  0.000000
5/17/2011	9:08:40 PM	SiCl4 MFC set to  0.000000
5/17/2011	9:08:40 PM	Bypass solenoid MFC set to  0.000000
5/17/2011	9:08:40 PM	Tube furnace set to 0
5/17/2011	9:08:40 PM	Run finished at 9:08 PM
5/17/2011	9:08:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/17/2011	9:12:00 PM	Bypass valve closed
5/17/2011	9:12:01 PM	Main Vac valve closed
5/17/2011	9:12:26 PM	Bypass valve opened
5/17/2011	9:12:27 PM	Main Vac valve opened
5/17/2011	9:12:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/17/2011	9:12:53 PM	Recipe started at 9:12 PM
5/17/2011	9:12:53 PM	Helium valve closed
5/17/2011	9:12:53 PM	H2 valve closed
5/17/2011	9:12:53 PM	BCl3 valve closed
5/17/2011	9:12:53 PM	PH3 valve closed
5/17/2011	9:12:53 PM	SiCl4 pre valve closed
5/17/2011	9:12:53 PM	SiCl4 post valve closed
5/17/2011	9:12:53 PM	Main Vac valve closed
5/17/2011	9:12:53 PM	Bubbler valve closed
5/17/2011	9:12:53 PM	Bypass valve opened
5/17/2011	9:12:53 PM	Helium MFC set to  0.000000
5/17/2011	9:12:53 PM	H2 MFC set to  0.000000
5/17/2011	9:12:53 PM	BCl3 MFC set to  0.000000
5/17/2011	9:12:53 PM	PHl3 MFC set to  0.000000
5/17/2011	9:12:53 PM	SiCl4 MFC set to  0.000000
5/17/2011	9:12:53 PM	Bypass solenoid MFC set to  0.000000
5/17/2011	9:12:53 PM	Tube furnace set to 0
5/17/2011	9:12:54 PM	Helium valve closed
5/17/2011	9:12:54 PM	H2 valve closed
5/17/2011	9:12:54 PM	BCl3 valve closed
5/17/2011	9:12:54 PM	PH3 valve closed
5/17/2011	9:12:54 PM	SiCl4 pre valve closed
5/17/2011	9:12:54 PM	SiCl4 post valve closed
5/17/2011	9:12:54 PM	Bubbler valve closed
5/17/2011	9:12:54 PM	Main Vac valve opened
5/17/2011	9:12:54 PM	Bypass valve opened
5/17/2011	9:12:54 PM	Helium MFC set to  0.000000
5/17/2011	9:12:54 PM	H2 MFC set to  0.000000
5/17/2011	9:12:54 PM	BCl3 MFC set to  0.000000
5/17/2011	9:12:54 PM	PHl3 MFC set to  0.000000
5/17/2011	9:12:54 PM	SiCl4 MFC set to  0.000000
5/17/2011	9:12:54 PM	Bypass solenoid MFC set to  0.000000
5/17/2011	9:12:54 PM	Tube furnace set to 0
5/17/2011	9:13:01 PM	Run aborted at 9:13 PM
5/17/2011	9:13:01 PM	Helium valve closed
5/17/2011	9:13:01 PM	H2 valve closed
5/17/2011	9:13:01 PM	BCl3 valve closed
5/17/2011	9:13:01 PM	PH3 valve closed
5/17/2011	9:13:01 PM	SiCl4 pre valve closed
5/17/2011	9:13:01 PM	SiCl4 post valve closed
5/17/2011	9:13:01 PM	Bypass valve closed
5/17/2011	9:13:01 PM	Main Vac valve closed
5/17/2011	9:13:01 PM	Bubbler valve closed
5/17/2011	9:13:01 PM	Helium MFC set to  0.000000
5/17/2011	9:13:01 PM	H2 MFC set to  0.000000
5/17/2011	9:13:01 PM	BCl3 MFC set to  0.000000
5/17/2011	9:13:01 PM	PHl3 MFC set to  0.000000
5/17/2011	9:13:01 PM	SiCl4 MFC set to  0.000000
5/17/2011	9:13:01 PM	Tube furnace set to 0
5/17/2011	9:13:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/17/2011	9:13:06 PM	Main Vac valve opened
5/17/2011	9:13:06 PM	Bypass valve opened
5/17/2011	9:20:46 PM	Helium MFC set to  15.000000
5/17/2011	9:20:47 PM	Helium valve opened
5/17/2011	9:21:17 PM	Helium valve closed
